Publication | Closed Access
Anodic Ta2O5 for CMOS compatible low voltage electrowetting-on-dielectric device fabrication
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Citations
19
References
2008
Year
Materials ScienceElectrical EngineeringEngineeringAnodic Ta2o5MicrofabricationPiezoelectric NanogeneratorsNano Electro Mechanical SystemMicroelectronicsElectrochemistry
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