Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films - Concepedia

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Film thickness effect on texture and residual stress sign transition in sputtered TiN thin films

107

Citations

43

References

2017

Year

Yeting Xi, Kewei Gao, Xiaolu Pang, Huisheng Yang, Xiaotao Xiong, Hong Li, Alex A. Volinsky

Ceramics International

Materials ScienceEngineeringSurface ScienceApplied PhysicsThin FilmsFilm Thickness EffectChemical Vapor DepositionDepth-graded Multilayer CoatingMicrostructureThin Film Processing

References

	Year	Citations

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