Characterization and modeling of Fabry–Perot ultrasound sensors with hard dielectric mirrors for photoacoustic imaging

Abstract

A Fabry-Perot ultrasound sensor with nonhygroscopic dielectric mirrors made out of Ta₂O₅ and SiO₂ for use in photoacoustic tomography is described. The sensor offers flat frequency response up to 36 MHz, low noise-equivalent pressure (70 Pa), and near-omnidirectional response up to 20 MHz as well as optical transparency for near-infrared illumination. A numerical model was developed to predict its frequency response, and the results were validated experimentally. An image of the human palm was acquired to demonstrate in vivo imaging capabilities.