A 160 µA, 8 mdps/<inf>√</inf>Hz frequency-modulated MEMS yaw gyroscope

Abstract

This paper presents a frequency-modulated (FM), consumer-grade yaw-rate sensor. The system consists of a custom low-power (160 μA), low-phase-noise (-135 dBc/Hz at 100 Hz offset) integrated circuit (IC), coupled to a novel (930 μm) <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> z-axis MEMS sensor fabricated in a 24-μm-thick industrial process. In operation, it shows a ratiometric scale factor of 1.6 Hz/Hz, and a white noise of 8 mdps/√Hz, both independent of process nonuniformities.