Effects of hot-isostatic pressing and annealing post-treatment on HfO2 and Ta2O5 films prepared by ion beam sputtering - Concepedia

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Effects of hot-isostatic pressing and annealing post-treatment on HfO2 and Ta2O5 films prepared by ion beam sputtering

18

Citations

15

References

2017

Year

Lishuan Wang, Huasong Liu, Yugang Jiang, Yang Xiao, Dandan Liu, Yiqin Ji, Feng Zhang, Deying Chen

Materials EngineeringMaterials ScienceIon ImplantationMaterial AnalysisEngineeringTa2o5 FilmsSurface ScienceApplied PhysicsHot-isostatic PressingIon Beam SputteringThin FilmsChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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