Publication | Closed Access
Features of copper coatings growth at high-rate deposition using magnetron sputtering systems with a liquid metal target
21
Citations
27
References
2017
Year
Materials ScienceMaterials EngineeringEngineeringCorrosionSurface ScienceApplied PhysicsLiquid Metal TargetHigh-rate DepositionChemical DepositionChemical Vapor DepositionThin Film ProcessingCopper Coatings Growth
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