Publication | Closed Access
Tunable defect engineering in TiON thin films by multi-step sputtering processes: from a Schottky diode to resistive switching memory
29
Citations
47
References
2017
Year
EngineeringComputer ArchitectureTion Thin FilmsDefect TolerancePhase Change MemoryNanoelectronicsMulti-step Sputtering ProcessesMemory DeviceThin Film ProcessingMaterials EngineeringMaterials ScienceElectrical EngineeringDefect EngineeringElectronic MemoryMicroelectronicsTunable Defect EngineeringApplied PhysicsSemiconductor MemoryThin Films
The role of defect engineering is essential in resistive switching memory.
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