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Direct growth of VO 2 nanoplatelets on glass and silicon by pulsed laser deposition through substrate temperature control

Materials ScienceAdvanced Laser ProcessingEngineeringMicrofabricationNanotechnologySurface ScienceApplied PhysicsLaser Processing TechnologySubstrate Temperature ControlLaser-assisted DepositionDirect GrowthPulsed Laser DepositionVo 2Chemical Vapor Deposition