Empirical modelling and optimization of pre-heat temperature and Ar flow rate using response surface methodology for stoichiometric Sb2Te3 thin films prepared by RF magnetron sputtering

Tanakorn Khumtong, Aparporn Sakulkalavek, Rachsak Sakdanuphab

Journal of Alloys and Compounds · 2017 · 18 citations · 29 references

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