Publication | Open Access
Simulation and experimental observation of silicon particles' vaporization in RF thermal plasma reactor for preparing Si nano-powder
26
Citations
33
References
2017
Year
EngineeringExperimental ObservationNanomanufacturingApplied PhysicsPlasma SimulationSi Nano-powderSilicon ParticlesGas Discharge PlasmaNonthermal PlasmaMicroelectronicsPlasma ProcessingPlasma Application
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