Microstructure and mechanical properties of Ti/Al co-doped DLC films: Dependence on sputtering current, source gas, and substrate bias - Concepedia

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Microstructure and mechanical properties of Ti/Al co-doped DLC films: Dependence on sputtering current, source gas, and substrate bias

65

Citations

27

References

2017

Year

Ting Guo, Cuicui Kong, Xiaowei Li, Peng Guo, Zhenyu Wang, Aiying Wang

Applied Surface Science

Materials EngineeringMaterials ScienceMaterial AnalysisEngineeringMechanical PropertiesSubstrate BiasSurface ScienceApplied PhysicsMechanical EngineeringHigh-performance MaterialThin FilmsMicroelectronicsChemical Vapor DepositionSource GasThin Film Processing

References

	Year	Citations

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