Methane dissociation process in inductively coupled Ar/H2/CH4 plasma for graphene nano-flakes production

Abstract

The role of hydrogen and methane dissociation process in induction plasma synthesis of graphene nano-flakes (GNF) is studied by the optical emission spectroscopy of Ar/H2/CH4 plasma. The condensation of C2 species formed due to methane decomposition produces GNF, which depends on pressure. Electron impact and dehydrogenation processes dissociate methane, which promotes and hinders the GNF production, respectively. The effect of hydrogen is insignificant on quality, size and morphology of the GNF. The CH4 flow rate has no influence on particle temperature but has effect on cooling rate at the point of nucleation and, therefore, on production rate and thickness of GNF.