Publication | Closed Access
Formation mechanisms of Si 3 N 4 and Si 2 N 2 O in silicon powder nitridation
38
Citations
19
References
2017
Year
Materials EngineeringMaterials ScienceSilicon Powder NitridationEngineeringSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationChemistrySi 3Silicon On InsulatorMicrostructureSi 2
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