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Effects of magnetic field strength and deposition pressure on the properties of TiN films produced by high power pulsed magnetron sputtering (HPPMS)

Materials ScienceMagnetismMaterials EngineeringEngineeringSurface ScienceApplied PhysicsHigh PowerMagnetron SputteringMagnetic Thin FilmsThin FilmsPulsed Laser DepositionDeposition PressureThin Film Processing