Publication | Closed Access
Fluence-dependent sputtering yield of micro-architectured materials
20
Citations
22
References
2017
Year
Materials EngineeringMaterials ScienceMicro-architectured MaterialsEngineeringMaterial AnalysisApplied PhysicsThin Film Process TechnologyMicroelectronicsThin Film ProcessingMicrostructure
| Year | Citations | |
|---|---|---|
Page 1
Page 1