Fabrication and characterization of WO 3 thin films on silicon surface by thermal evaporation - Concepedia

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Fabrication and characterization of WO 3 thin films on silicon surface by thermal evaporation

79

Citations

12

References

2017

Year

Shenghao Li, Zhirong Yao, Jixiang Zhou, Rui Zhang, Hui Shen

Materials Letters

Materials ScienceWo 3EngineeringSurface ScienceApplied PhysicsSilicon SurfaceSemiconductor Device FabricationThermal EvaporationThin FilmsSilicon On InsulatorChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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