Publication | Closed Access
C-Axis oriented crystalline IGZO thin-film transistors by magnetron sputtering
37
Citations
25
References
2017
Year
Materials ScienceRoom TemperatureElectrical EngineeringEpitaxial GrowthEngineeringNanoelectronicsApplied PhysicsMagnetron SputteringCrystalline Igzo FilmsSemiconductor Device FabricationThin Film Process TechnologyThin FilmsMolecular Beam EpitaxyMicroelectronicsThin Film Processing
We successfully fabricated <italic>c</italic>-axis oriented crystalline IGZO films at room temperature by magnetron sputtering.
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