3D patterning of silicon by contact etching with anodically biased nanoporous gold electrodes

E. Torralba, Mathieu Halbwax, Taha El Assimi, Marin Fouchier, Vincent Magnin, J. Harari, Jean‐Pierre Vilcot, Sylvain Le Gall, Raphaël Lachaume, Christine Cachet‐Vivier,

Electrochemistry Communications · 2017 · 17 citations · 14 references

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