Effects of anode layer linear ion source on the microstructure and mechanical properties of amorphous carbon nitride films - Concepedia

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Effects of anode layer linear ion source on the microstructure and mechanical properties of amorphous carbon nitride films

13

Citations

36

References

2017

Year

Ye Peng, Feng Xu, Jinxin Wu, Shuai Tian, Xianrui Zhao, Xiaolong Tang, Dunwen Zuo

Surface and Coatings Technology

Materials ScienceAmorphous CarbonEngineeringMechanical PropertiesApplied PhysicsAmorphous SolidChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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