High power impulse magnetron sputtered p-type γ-titanium monoxide films: Effects of substrate bias and post-annealing on microstructure characteristics and optoelectrical properties

Wu-Chang Peng, Ying-Hung Chen, Jingyu Chen, Ju‐Liang He, Dong‐Sing Wuu

Materials Science in Semiconductor Processing · 2017 · 15 citations · 32 references

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