Comparison between BAW and SAW sensor principles

Abstract

A comparison is given between piezoelectrically excited bulk acoustic wave (BAW) and surface acoustic wave (SAW) elements with respect to their primary sensitivity functions and principal capabilities for sensor applications. The importance of mode purity for high dynamic range sensors is emphasized. Characteristic sensor examples are reviewed, and the special demands on the electronics for BAW and SAW elements in the sensor field are described (e.g., cable problem, wireless SAW sensors). For a fair evaluation, a performance figure, SQ, defined as the product of reduced sensitivity S and resonator Q-value, is introduced. The potential of alternative piezoelectric materials for future sensor developments is discussed briefly.