Publication | Closed Access
Enhanced properties of tungsten thin films deposited with a novel HiPIMS approach
72
Citations
37
References
2017
Year
Materials EngineeringMaterials ScienceMaterial AnalysisEngineeringNanotechnologySurface ScienceApplied PhysicsTungsten Thin FilmsNovel Hipims ApproachEnhanced PropertiesThin Film Process TechnologyThin FilmsMolecular Beam EpitaxyChemical Vapor DepositionThin Film Processing
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