Chemical Vapor Deposition of Large-Size Monolayer MoSe₂ Crystals on Molten Glass

Abstract

We report the fast growth of high-quality millimeter-size monolayer MoSe₂ crystals on molten glass using an ambient pressure CVD system. We found that the isotropic surface of molten glass suppresses nucleation events and greatly improves the growth of large crystalline domains. Triangular monolayer MoSe₂ crystals with sizes reaching ∼2.5 mm, and with a room-temperature carrier mobility up to ∼95 cm²/(V·s), can be synthesized in 5 min. The method can also be used to synthesize millimeter-size monolayer MoS₂ crystals. Our results demonstrate that "liquid-state" glass is a highly promising substrate for the low-cost growth of high-quality large-size 2D transition metal dichalcogenides (TMDs).