A novel low-voltage non-resonant piezoelectric linear actuator based on two alternative principles

Abstract

A piezoelectric actuator working on two alternative principles: stick-slip and friction-difference, is proposed, which can work in the step mode and smooth mode respectively. The actuator is mainly comprised of two stacks and a transmission unit. In the step mode, the fine step, thrust is 0.25 μm, 0.7 N respectively at 50 Vpp. The minimum step is 60 nm at 15 Vpp. In the smooth mode, the maximum output velocity is 34 mm/s at 3.7 kHz and 50 Vpp, which can realize rapid positioning. Low voltage simplifies the circuits enormously. Non-resonant frequency make the control system easy to be implemented.