High-speed laser writing of arbitrary patterns in polar coordinate system

Abstract

In order to realize high-speed laser writing arbitrary patterns, we establish a set of high-speed polar coordinate laser writing system. Although the polar coordinate laser writing system is generally suitable for fabricating circular symmetric patterns, there are challenges when dealing with arbitrary patterns. Here, we propose an effective method to solve this problem by converting the pattern data from Cartesian coordinates to polar coordinates for high-speed laser writing of arbitrary patterns. Several types of arbitrary patterns are written on chalcogenide thin films with a minimum pattern linewidth of 700 ± 70 nm and a maximum writing speed of approximately 10 m/s, which corresponds to more than 600 mm²/min at 1.0 μm linewidth. This writing speed is ten times faster than that of the conventional x-y type Cartesian coordinate laser writing system.