Publication | Open Access
High temperature nanoscratching of single crystal silicon under reduced oxygen condition
55
Citations
49
References
2016
Year
Materials ScienceSingle Crystal SiliconEngineeringNanoscale ChemistryNanomaterialsNanotechnologyApplied PhysicsOxygen ConditionSemiconductor Device FabricationNanoscale ScienceNanocrystalline MaterialHigh Temperature NanoscratchingSilicon On Insulator
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