High voltage glow discharge electron guns and its advanced application examples in electronic industry

S.V. Denbnovetsky, Igor Melnyk, V. G. Melnyk, B. A. Tugai, Serhii Tuhai

2016 · 15 citations · 4 references

Concepts

Abstract

This paper is devoted to examples of some up-to-date and advanced possibilities of using of high voltage glow discharge electron beam guns for realising of different technological operations in electronic industry.

References

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