2016 · 15 citations · 4 references
EngineeringElectrical EngineeringPhysicsElectronic MaterialsMicroelectronicsPlasma PhysicsCurrent-voltage CharacteristicsElectron Beam PhysicsElectron AcceleratorsElectron Beam GenerationElectron Beam SourcesGlow DischargesHigh-intensity Electron Beams
This paper is devoted to examples of some up-to-date and advanced possibilities of using of high voltage glow discharge electron beam guns for realising of different technological operations in electronic industry.
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