Glass thickness and index measurement using optical sampling by cavity tuning

Abstract

In this paper, we describe a method based on optical sampling by cavity tuning, which is capable of high-accuracy glass thickness and index measurement. By tuning the repetition frequency of the frequency comb, a series of cross-correlation patterns can be obtained that correspond to the front and rear surfaces of the specimen and the co-operation mirror. Both the geometrical thickness and the optical thickness of the specimen can be measured via the cross-correlation patterns, and consequently, the glass refractive index can be determined at the same time. The comparison with the reference value shows an agreement within 1.3 μm for the thickness measurement, and within 5×10^-4 for the refractive index measurement.