Concepedia

Publication | Closed Access

Plasma characteristics and properties of Cu films prepared by high power pulsed magnetron sputtering

DOI

29

Citations

36

References

2016

Year

Baohua Wu, Jian Wu, Fan Jiang, Donglin Ma, C.Z. Chen, Hong Sun, Y.X. Leng, Nan Huang
Vacuum

References

YearCitations

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