Thin film deposition of Ta, TaN and Ta/TaN bi-layer on Ti and SS316-LVM substrates by RF sputtering - Concepedia

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Thin film deposition of Ta, TaN and Ta/TaN bi-layer on Ti and SS316-LVM substrates by RF sputtering

35

Citations

40

References

2016

Year

Angélica Jara, Bernard Fraisse, Valérie Flaud, Nicole Fréty, Gema González

Surface and Coatings Technology

Materials ScienceMaterials EngineeringEngineeringThin-film FabricationTa/tan Bi-layerSurface ScienceApplied PhysicsSs316-lvm SubstratesChemical Vapor DepositionThin FilmsChemical DepositionMicroelectronicsThin Film DepositionDepth-graded Multilayer CoatingThin Film Processing

References

	Year	Citations

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