Concepedia

Publication | Closed Access

Multiscale modeling of doping processes in advanced semiconductor devices

DOI

16

Citations

60

References

2016

Year

Nikolas Zographos, Christoph Zechner, Ignacio Martin‐Bragado, Kyuho Lee, Yong‐Seog Oh
Materials Science in Semiconductor Processing

References

YearCitations

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