Publication | Closed Access

The effect of deposition processing on structural and luminescent properties of a-SiOC:H thin films fabricated by RF-magnetron sputtering

Materials EngineeringMaterials ScienceEngineeringSurface ScienceApplied PhysicsDeposition ProcessingRf-magnetron SputteringThin FilmsPulsed Laser DepositionMicroelectronicsChemical DepositionH Thin FilmsChemical Vapor DepositionThin Film Processing