FBAR resonator figure of merit improvements

Abstract

Free-standing Bulk Acoustic Resonator (FBAR), as one type of bulk acoustic wave (BAW) devices, has extremely high Q to enable excellent filter performance, and has been successfully applied to the wireless communication market. The Bode equation to calculate the unloaded Q is used to map the Avago FBAR product line resonator Rp values. The manufacturing Rp values from old and new generations of FBAR products are collected and compared to demonstrate the importance of the figure of merit (FOM) improvements.