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Diamond-like carbon thin films with high density and low internal stress deposited by coupling DC/RF magnetron sputtering

Materials ScienceMaterials EngineeringHigh DensityDc/rf MagnetronEngineeringGlassy CarbonDiamond-like CarbonCarbon-based MaterialNanoelectronicsApplied PhysicsLow Internal StressThin FilmsCarbon-based FilmsThin Film Processing