Electronics Letters · 2002 · 16 citations · 6 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectromechanical SystemsMicroelectronicsPhotonicsMems DesignMems SwitchesOptical MemsOptical PolymersOptical SwitchingSilicon PhotonicsIntegrated Optical SwitchesLow-voltage ActuationMicroelectromechanical SwitchesMicroelectromechanical Systems Optical SwitchingMicromachined Switch DesignMicroswitchesSilicon-on-insulator ProcessingSilicon-on-insulator Technology
A new planar optical switch concept based on a silicon-on-insulator microelectromechanical system (MEMS) structure with post-processed polymeric waveguides is reported. The actuation voltage is 20 to 50 V, and the switching time as low as 30 µs. A crosstalk of −32 dB has been measured.
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Digital optical switch based on ‘oversized’polymer rib waveguides
R. Moosburger, G. Fischbeck, C. Kostrzewa et al. · Electronics Letters · 1996 · 29 citations
Natural Sciences, Electrical Engineering, Materials Science +17
Walter Nelson, Anwesha Choudhury, Michael D. Abdalla et al. · IEEE Photonics Technology Letters · 1994 · 28 citations