Publication | Closed Access
Room Temperature Terahertz Microbolometers
18
Citations
3
References
2006
Year
Unknown Venue
Thz PhotonicsTerahertz TechnologyEngineeringMicro-optical ComponentSilicon On InsulatorCalibrationPhotonic Integrated CircuitInstrumentationPlanar Waveguide SensorPhotonicsOptical BandwidthTerahertz SpectroscopyPhysicsTerahertz NetworkTerahertz ScienceUncooled Antenna-coupled MicrobolometerMicrowave PhotonicsTerahertz DevicesAmorphous Silicon ThermistorMicrofabricationApplied PhysicsTerahertz TechniqueOptoelectronicsTerahertz Applications
We report on the development of an array of uncooled antenna-coupled microbolometer based on an amorphous silicon thermistor. The design goal is an optical bandwidth of 0.2-1 THz with a NEP of 1 pW/Hz/sup 1/2 / per pixel.
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