Publication | Closed Access
Enhancement of optical and mechanical properties of Si nanopillars by ALD TiO<sub>2</sub> coating
30
Citations
44
References
2016
Year
Materials ScienceOptical MaterialsEngineeringMechanical PropertiesNanomaterialsNanotechnologyOptical PropertiesMaterials CharacterizationApplied PhysicsMechanical EngineeringSi NanopillarsSurface NanotechnologyOptoelectronic DevicesNanoscale ScienceNanocrystalline MaterialDepth-graded Multilayer CoatingThin Film ProcessingNanostructures
The mechanical and optical properties of Si and TiO<sub>2</sub>–Si nanopillars (NPl) were investigated.
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