Science · 2016 · 1.5K citations · 37 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsMetal-oxide-semiconductor Field-effect TransistorsNanoelectronicsNanotubesSemiconductor Device MaterialsThin-film TransistorsTwo-dimensional SemiconductorsChannel ArchitectureGate Leakage CurrentGate Oxide LeakageLeakageLeakage Current ReductionNanoscale TransistorsSingle-walled Carbon NanotubesThin Oxide Layers
A flatter route to shorter channels High-performance silicon transistors can have gate lengths as short as 5 nm before source-drain tunneling and loss of electrostatic control lead to unacceptable leakage current when the device is off. Desai et al. explored the use of MoS 2 as a channel material, given that its electronic properties as thin layers should limit such leakage. A transistor with a 1-nm physical gate was constructed with a MoS 2 bilayer channel and a single-walled carbon nanotube gate electrode. Excellent switching characteristics and an on-off state current ratio of ∼10 6 were observed. Science , this issue p. 99
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