MoS<sub>2</sub>transistors with 1-nanometer gate lengths

Sujay B. Desai, Surabhi R. Madhvapathy, Angada B. Sachid, Juan Pablo Llinas, Qingxiao Wang, Geun Ho Ahn, Gregory Pitner, Moon J. Kim, Jeffrey Bokor, Chenming Hu,

Science · 2016 · 1.5K citations · 37 references

DOIFull text

Open access

Concepts

Abstract

A flatter route to shorter channels High-performance silicon transistors can have gate lengths as short as 5 nm before source-drain tunneling and loss of electrostatic control lead to unacceptable leakage current when the device is off. Desai et al. explored the use of MoS 2 as a channel material, given that its electronic properties as thin layers should limit such leakage. A transistor with a 1-nm physical gate was constructed with a MoS 2 bilayer channel and a single-walled carbon nanotube gate electrode. Excellent switching characteristics and an on-off state current ratio of ∼10 6 were observed. Science , this issue p. 99

References

37