Concepedia
Journal of the Korean Physical Society · 2003 · 28 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceManufacturing ProcessesMaterials ProcessingSemiconductor DevicesCrystalline MaterialsFabrication MaterialsSemiconductor Device MaterialsSilicon MaterialsSubstrate PreparationSurface TexturingCrystalline SiliconSilicon WafersTexturing