Solution-processed ultra-low-k thin films comprising single-walled aluminosilicate nanotubes

Abstract

Nanotube-based ultra-low-k thin films with high Young's modulus composed of single-walled aluminosilicate nanotubes (AlSiNTs) and a trace amount of poly(vinyl alcohol) (PVA) have been developed. The dehydrated AlSiNT film possesses a relative permittivity of 1.05, and a Young's modulus of 25 GPa, which exceed those of most existing ultra-low-k materials.