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Nano-scale elastic–plastic properties and indentation-induced deformation of amorphous silicon carbide thin film

Materials ScienceEngineeringMechanical PropertiesMechanical EngineeringApplied PhysicsNano-scale Elastic–plastic PropertiesSolid MechanicsThin FilmsPlasticityAmorphous SolidIndentation-induced DeformationNanomechanicsMechanics Of MaterialsCarbideThin Film Processing