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Composition and mechanical properties of B-C-W and B-C-Ti thin films prepared by pulse magnetron sputtering

Materials EngineeringMaterials ScienceEngineeringMechanical PropertiesMechanical EngineeringApplied PhysicsB-c-ti Thin FilmsPulse Magnetron SputteringThin Film Process TechnologyMagnetic Thin FilmsThin FilmsThin Film Processing