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Spectroscopic characterization of the plasmas formed during the deposition of ZnO and Al-doped ZnO films by plasma-assisted pulsed laser deposition

Materials ScienceEngineeringSpectroscopic CharacterizationOxide ElectronicsApplied PhysicsLaser DepositionLaser-assisted DepositionGas Discharge PlasmaPulsed Laser DepositionAl-doped Zno Films