Synthesis of High‐Quality Large‐Area Homogenous 1T′ MoTe₂ from Chemical Vapor Deposition

Abstract

High-quality large-area few-layer 1T' MoTe₂ films with high homogeneity are synthesized by the controlled tellurization of MoO₃ film. The Mo precursor plays a key role in determining the quality and morphology of the 1T' MoTe₂ . Furthermore, the amount of Te strongly influences the phase of the MoTe₂ . The growth method paves the way toward the scalable production of 1T' MoTe₂ -based applications.