Concepedia

Publication | Open Access

Hollow-cathode activated PECVD for the high-rate deposition of permeation barrier films

DOIFull Paper Access

27

Citations

28

References

2016

Year

Michiel Top, Steffen Schönfeld, John Fahlteich, Sebastian Bunk, Thomas Kühnel, Steffen Straach, J. Th. M. De Hosson
Surface and Coatings Technology

References

YearCitations

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