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Reduced operating temperature of active layer Si covered by nanocrystalline diamond film

Materials ScienceMaterials EngineeringElectrical EngineeringDiamond-like CarbonEngineeringNanotechnologyNanocrystalline Diamond FilmApplied PhysicsSemiconductor Device FabricationChemical Vapor DepositionActive Layer SiSilicon On InsulatorThin Film Processing