Room temperature deposition of homogeneous, highly transparent and conductive Al-doped ZnO films by reactive high power impulse magnetron sputtering - Concepedia

Concepedia

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Room temperature deposition of homogeneous, highly transparent and conductive Al-doped ZnO films by reactive high power impulse magnetron sputtering

DOI Full Paper Access

80

Citations

32

References

2016

Year

Martin Mickan, Ulf Helmersson, H. Rinnert, Jaâfar Ghanbaja, D. Müller, David Horwat

Solar Energy Materials and Solar Cells

Materials EngineeringRoom Temperature DepositionMaterials ScienceAluminium NitrideEngineeringOxide ElectronicsApplied PhysicsThin FilmsChemical DepositionThin Film Processing

References

	Year	Citations

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