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Effects of Ar ion bombardment by unbalanced magnetron sputtering on mechanical and thermal properties of Ti-Cu-Zr-Ni-Hf-Si thin film metallic glass

Materials ScienceMaterials EngineeringIon ImplantationEngineeringApplied PhysicsAmorphous MetalUnbalanced MagnetronAr Ion BombardmentThin Film ProcessingMicrostructureThermal Properties