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Impact of silicide layer on single photon avalanche diodes in a 130 nm CMOS process

PhotonicsElectrical EngineeringEngineeringPhysicsNanoelectronicsApplied PhysicsSilicide LayerSemiconductor Device FabricationPhotonic Integrated CircuitNm Cmos ProcessMicroelectronicsOptoelectronicsCompound SemiconductorSemiconductor Device