Publication | Open Access

Influence of temperature on the anisotropic cutting behaviour of single crystal silicon: A molecular dynamics simulation investigation

Materials ScienceSingle Crystal SiliconEngineeringMicrofabricationSilicon On InsulatorMaterial SimulationApplied PhysicsMaterial ModelingNanoscale ModelingSolid MechanicsSoft MatterMolecular DynamicsMechanics Of MaterialsMicrostructureAnisotropic Material